PIHera高精度ステージ P-620.Z－P-622.Z

PIHera Vertical Precision Positioner Variable Travel Ranges and Axis Configuration P-620.Z - P-622.Z n Travel ranges 50 µm to 250 µm (350 µm open loop) n Resolution to 0.1 nm n Linearity error only 0.02 % n Direct position measuring with capacitive sensors n X, XY, Z, XYZ versions Application fields n Interferometry n Microscopy n Nanopositioning n Biotechnology n Test applications n Semiconductor technology Outstanding lifetime due to PICMA® piezo actuators The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven. Subnanometer resolution with capacitive sensors Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range. High guiding accuracy due to zero-play flexure guides Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capa- city and they are insensitive to shock and vibration. They work in a wide temperature range. Maximum accuracy due to direct position measuring Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control. Motion Unit Toleran- ce P-620.Z0L P-620.ZCD P-620.ZCL P-621.Z0L P-621.ZCD P-621.ZCL P-622.Z0L P-622.ZCD Active axes Z Z Z Z Z Z Z Z Travel range in Z µm 50 50 100 100 250 Travel range in Z, open loop µm ±20% 65 65 65 140 140 140 350 350 Linearity error in Z % Typ. 0.02 0.02 0.02 0.02 0.02 Yaw (Rotational crosstalk in θX with motion in Z) µrad Typ. ± 80 ± 80 ± 80 ± 100 ± 100 ± 100 ± 200 ± 200 Pitch (Rotational crosstalk in θY with motion in Z) µrad Typ. ± 80 ± 80 ± 80 ± 100 ± 100 ± 100 ± 200 ± 200 ___ Page 1 11.11.2021 WWW.PI.WS

Positioning Unit Toleran- ce P-620.Z0L P-620.ZCD P-620.ZCL P-621.Z0L P-621.ZCD P-621.ZCL P-622.Z0L P-622.ZCD Capacitive, Capacitive, Capacitive, Capacitive, Capacitive, Integrated sensor direct posi- direct posi- direct posi- direct posi- direct posi- tion measu- tion measu- tion measu- tion measu- tion measu- ring ring ring ring ring System resolution in Z nm 0.2 0.2 0.3 0.3 1 Resolution in Z, open loop nm Typ. 0.1 0.1 0.1 0.2 0.2 0.2 0.5 0.5 Bidirectional repeatability in Z nm Typ. ± 1 ± 1 ± 1 ± 1 ± 1 ___ Drive Properties Unit Toleran- ce P-620.Z0L P-620.ZCD P-620.ZCL P-621.Z0L P-621.ZCD P-621.ZCL P-622.Z0L P-622.ZCD Drive type PICMA® PICMA® PICMA® PICMA® PICMA® PICMA® PICMA® PICMA® Electrical capacitance in Z µF ±20% 0.7 0.7 0.7 3 3 3 6.2 6.2 Operating frequency Hz 333 333 333 263 263 263 120 120 ___ Mechanical Properties Unit Toleran- ce P-620.Z0L P-620.ZCD P-620.ZCL P-621.Z0L P-621.ZCD P-621.ZCL P-622.Z0L P-622.ZCD Flexure gui- Flexure gui- Flexure gui- Flexure gui- Flexure gui- Flexure gui- Flexure gui- Flexure gui- Guide de with le- de with le- de with le- de with le- de with le- de with le- de with le- de with le- ver amplifi- ver amplifi- ver amplifi- ver amplifi- ver amplifi- ver amplifi- ver amplifi- ver amplifi- cation cation cation cation cation cation cation cation Stiffness in Z N/µm ±20 % 0.5 0.5 0.5 0.6 0.6 0.6 0.24 0.24 Resonant frequency in Z, under load with 30 g Hz ±20% 690 690 690 500 500 500 270 270 Resonant frequency in Z, unloaded Hz ±20% 1000 1000 1000 790 790 790 360 360 Permissible push force in Y N Max. 10 10 10 10 10 10 10 10 Permissible push force in Z N Max. 10 10 10 10 10 10 10 10 Permissible pull force in Z N Max. 5 5 5 8 8 8 8 8 Overall mass g 120 120 120 170 170 170 240 240 Material Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum ___ Miscellaneous Unit P-620.Z0L P-620.ZCD P-620.ZCL P-621.Z0L P-621.ZCD P-621.ZCL P-622.Z0L P-622.ZCD LEMO FFS. LEMO FFS. LEMO FFS. Connector 00.250.CT- D-sub 7W2 CE24 (m) 00.250.CT- 00.250.CT- D-sub 7W2 LEMO FFS. LEMO FFS. 00.250.CT- 00.250.CT- D-sub 7W2 CE24 CE24 (m) CE24 CE24 (m) LEMO for Sensor connector D-Sub 7W2 (m) capacitive D-Sub 7W2 LEMO for capacitive D-Sub 7W2 sensors (m) sensors (m) E-503, E- E-503, E- E-503, E- E-503, E- E-503, E- Recommended controllers E-503, E- 505, E-610, 505, E-610, / drivers 505, E-610 E-621, E- E-621, E- E-503, E- 505, E-610, 505, E-610, 505, E-610, 625, E-709. 505, E-610 E-621, E- E-621, E- E-503, E- 625, E-709. 505, E-610 E-621, E- 625, E-709. 625, E-709. 625, E-709. 1C1L, E-754 1C1L, E-754 1C1L, E-754 1C1L, E-754 1C1L, E-754 Cable length m 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 Operating temperature range °C -20 to 150 -20 to 80 -20 to 80 -20 to 150 -20 to 80 -20 to 80 -20 to 150 -20 to 80 ___ Motion Unit Toleran- ce P-622.ZCL Active axes Z Travel range in Z µm 250 Travel range in Z, open loop µm ±20% 350 Linearity error in Z % Typ. 0.02 Yaw (Rotational crosstalk in θX with motion in Z) µrad Typ. ± 200 Pitch (Rotational crosstalk in θY with motion in Z) µrad Typ. ± 200 ___ Page 2 11.11.2021 WWW.PI.WS

Positioning Unit Toleran- ce P-622.ZCL Integrated sensor Capacitive, direct position measuring System resolution in Z nm 1 Resolution in Z, open loop nm Typ. 0.5 Bidirectional repeatability in Z nm Typ. ± 1 ___ Drive Properties Unit Toleran- ce P-622.ZCL Drive type PICMA® Electrical capacitance in Z µF ±20% 6.2 Operating frequency Hz 120 ___ Mechanical Properties Unit Toleran- ce P-622.ZCL Guide Flexure guide with lever amplification Stiffness in Z N/µm ±20 % 0.24 Resonant frequency in Z, under load with 30 g Hz ±20% 270 Resonant frequency in Z, unloaded Hz ±20% 360 Permissible push force in Y N Max. 10 Permissible push force in Z N Max. 10 Permissible pull force in Z N Max. 8 Overall mass g 240 Material Aluminum ___ Miscellaneous Unit P-622.ZCL Connector LEMO FFS.00.250.CTCE24 Sensor connector LEMO for capacitive sensors Recommended controllers / drivers E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754 Cable length m 1.5 Operating temperature range °C -20 to 80 ___ The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C). ___ Page 3 11.11.2021 WWW.PI.WS

Drawings / Images P-62x.ZCD / .ZCL / .Z0L, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Order Information P-620.Z0L Precise PIHera vertical nanopositioning stage, 65 µm, without sensor, LEMO connectors P-620.ZCD Precise PIHera vertical nanopositioning stage, 50 µm, direct position measuring, capacitive sensor, D-sub connector P-620.ZCL Precise PIHera vertical nanopositioning stage, 50 µm, direct position measuring, capacitive sensor, LEMO connectors P-621.Z0L Precise PIHera vertical nanopositioning stage, 140 µm, without sensor, LEMO connectors P-621.ZCD Precise PIHera vertical nanopositioning stage, 100 µm, direct position measuring, capacitive sensor, D-sub connector P-621.ZCL Precise PIHera vertical nanopositioning stage, 100 µm, direct position measuring, capacitive sensor, LEMO connectors Page 4 11.11.2021 WWW.PI.WS

Order Information P-622.Z0L Precise PIHera vertical nanopositioning stage, 350 µm, without sensor, LEMO connectors P-622.ZCD Precise PIHera vertical nanopositioning stage, 250 µm, direct position measuring, capacitive sensor, D-sub connector P-622.ZCL Precise PIHera vertical nanopositioning stage, 250 µm, direct position measuring, capacitive sensor, LEMO connectors Page 5 11.11.2021 WWW.PI.WS