MAGNETRON

MAGNETRON High-vacuum magnetron sputtering sources Key Features: • High-vacuum compatible • Accept industry-standard targets • Water-cooled • Variety of mounting options • Adjustable head angle and height geometry options • Easy removal for maintainance • Magnetic strength/profile options • High target yield Overview: MAGNETRON sources from Moorfield are of modular design and geared for the R&D/pilot-line user. A range of cathode sizes (2”, 3” and 4”) are available to suit customer applications and budgets. The sources are designed to be used in any orientation, are low-outgassing, suitable for a wide range of operating pressures and provide excellent deposition uniformity and rates. Configurations: Tube mounted: The head is supported by a 3/4” OD tube, ideal for a 1” bolt baseplate feedthrough. Vertical adjustment of the source is then possible. Flange-mounted: The source is supplied pre-integrated with a supporting flange, ready for system integration. Many flanges can be used, e.g., ISO100, NW100CF and 1” bolt baseplate feedthroughs. Flexi-Head: The Flexi-Head option allows for adjustment of the head tilt angle (in addition to vertical position). Continuous adjustment of ±45° is possible. Magnetic profiles: Available with balanced or unbalanced magnet packs, of standard or high strength. Targets: Suitable for use with 2”, 3” or 4” disc targets of industry- standard design. High target utilisation, without any special requirements such as keepers or thermal pastes. Sputtering power: All MAGNETRON models are suitable for use with RF, DC or pulsed-DC power supplies. MOORFIELD NANOTECHNOLOGY Unit 1, Wolfe Close, Parkgate Industrial Estate, Knutsford, Cheshire, UK, WA16 8XJ +44 (0)1565 722609 +44 (0)1565 722758 sales@moorfield.co.uk moorfield.co.uk Page 1 Moorfield Nanotechnology Limited. Registered in England and Wales with company number 3044718. Registered address: 112–114 Witton Street, Northwich, Cheshire, CW9 5NW.

MAGNETRON Technical Specification: Materials: Body material: Stainless steel (304). Target clamp: Aluminium or stainless steel (304) Bellows (for Flexi-Head): Stainless steel (316). Electrical isolation: PEEK/PTFE. Seals: Viton. Magnet pack: NiFeB; epoxy encapsulation. Cooling: 6 mm OD tube connections (e.g., for push-in fittings). Electrical connection: N-type screw terminal. Hardware Options: • Chimney head fitting • Gas injection ring • On-board shutter • In-vacuum head tilt gearing via rotary drive • Cross-contamination shielding Above: Drawing for MAGNETRON (for 3” targets, • Wide range of flange mountings: ISO100, NW100CF, with Flexi-Head option). 1” bolt baseplate feedthroughs, etc. • Tube mountings of various sizes Distributed By: Associated Products from Moorfield: • Gas injection feedthroughs • Automated/manual gas and pressure control • Sputtering power supplies: RF, DC and pulsed-DC • PlasmaSwitch technology: Allows controlled routing of power between power supplies and MAGNETRON sources, including for co-deposition • Moorfield stainless steel chambers • nanoPVD and MiniLab automatic/manual magnetron sputtering systems MOORFIELD NANOTECHNOLOGY Unit 1, Wolfe Close, Parkgate Industrial Estate, Knutsford, Cheshire, UK, WA16 8XJ +44 (0)1565 722609 +44 (0)1565 722758 sales@moorfield.co.uk moorfield.co.uk Page 2 Moorfield Nanotechnology Limited. Registered in England and Wales with company number 3044718. Registered address: 112–114 Witton Street, Northwich, Cheshire, CW9 5NW.