Research-grade, high performace magnetron sputtering system
A benchtop, RF and DC magnetron sputtering system for metals and insulating materials. Compact as an electron microscopy coater, but with high-end hardware for research-grade results.
Movie
Document Information
| Document Title | nanoPVD-S10A |
|---|---|
| Document Type | Product Catalog |
| File size | 225.7Kb |
| Category | |
| Company | Thermocera Japan Ltd. (Documents List) |
Documents related to this company
Document Contents
Page1
nanoPVD-S10A by Moorfield.
Research-grade magnetron sputtering.
Model T15A
Moorfield Nanotechnology Limited. Unit 1, Wolfe Close, Parkgate Industrial Estate, Knutsford, Cheshire, UK, WA16 8XJ.
Registered in England and Wales with company number 3044718.
PRODUCT INFORMATION e: sales@moorfield.co.uk t: +44 (0)1565 722609 w: moorfield.co.uk
Page2
A Vacuum chamber
B Chamber viewport
C Touchscreen HMI
D DC power supply
A C E
F
B
D G
H
E Hardware connections
F Turbomolecular pump
G Electrical connections
H Water/gas/data connections
Benchtop, turnkey system for high performance RF
and DC magnetron sputtering. Compact as an electron
microscopy coater, but with research-grade results.
Recently introduced, nanoPVD model S10A is a magnetron sputtering system designed for repeatable coating of metals or
inorganics (e.g., oxides or nitrides). Compact and suitable for benchtop location, nanoPVD systems are derived from proven
R&D thin-film system technology and have been developed through extensive collaboration with leading academic groups.
The tools are optimised for ease of use, represent outstanding value for money and are ideal where available space and
budgets are key considerations—without compromising on quality of results.
• Benchtop configuration
• Up to 3 × 2” magnetron sputtering sources
• Up to 3 MFC-controlled process gases
• DC and/or RF power options
• Fully automatic operation via touchscreen HMI
• Up to 4” diameter substrates
• Sample heating option
• Turbomolecular pumping system
• Base pressures < 5 × 10-7 mbar
• Define/save multiple process recipes
• Automatic pressure control option
• Equipped for easy servicing
• Comprehensive safety features
• Cleanroom compatible
• Proven performance
LEFT: Model of magnetron sputtering source
as fitted to the nanoPVD-S10A.
CENTRE: nanoPVD-S10A chamber baseplate
with three magnetron sputtering sources.
RIGHT: View through optional chamber
viewport, showing operating magnetron
sputtering source on nanoPVD-S10A.
Visit moorfield.co.uk or call +44(0) 1565 722609
Moorfield Nanotechnology Limited. Unit 1, Wolfe Close, Parkgate Industrial Estate, Knutsford, Cheshire, UK, WA16 8XJ.
Registered in England and Wales with company number 3044718.
PRODUCT INFORMATION e: sales@moorfield.co.uk t: +44 (0)1565 722609 w: moorfield.co.uk