50kV custom multiple output power supply for “electron beam lithography with TFE-type emitter” .

Model : FE503XP 50kV custom multiple output power supply for “electron beam lithography with TFE-type emitter” . Application ・Electron beam lithography * controller panel is optional Product specifications Input voltage 90V～240VAC single phase 1.5A(50,60HZ) The other specifications Accelerator supply (Referenced to GND) All the outputs provide with the over voltage Output voltage: -1K~-51.2kV protection and the over current protection. Absolute voltage accuracy: Less than 0.1% Set ability: 16bit (0.1V LSB) External control: Optical isolated RS232C Output current: 100 A max Interlock: vacuum, thermo, HV-connectionμ Ripple noise: Less than2ppm 100mVp-p@50kV HV connector: Customer specification Stability: 5ppm/1hr after 1hr warm up Output monitor: Accelerator ripple, Extractor ripple temperature coefficient: 3ppm/ Storage temp range: -5℃~ +40℃℃ Filament supply (Referenced to Accelerator) Operating temperature Output wattage: 15W max Limit: +10℃~ +40℃ Humidity: 80% or less Set ability: 16bit (1mA LSB) Insulation method: Hybrid (Air and silicone rubber ) Output current: 0~3A max Externals size: 480mm(W) × 399(D) × 745 (H) Ripple noise: 10mA or less @3A Weight: 48kg Absolute current accuracy: ±0.01A Stability: 100ppm/1hour @ 3.0A The model “FE503XP” is an integrated temperature coefficient: 25ppm/℃ multiple output high voltage power Suppressor supply (Referenced to Accelerator) supply specifically developed for TFE Output voltage: -0.03kV~ -0.6kV type electron beam lithography. Absolute voltage accuracy: Less than 1.0% @300V Set ability: 14bit (0.11V LSB) Output current: 150 A max ＊ Please ask details. μ Ripple noise: Less than 20mVp-p e-mail info@futex.jp Stability: 50ppm/1hr after 1hr warm up temperature coefficient: 25ppm/℃ Extractor supply (Referenced to Accelerator) Output voltage: +0.3kV~+6.5kV Absolute voltage accuracy: Less than 0.1% Set ability: 16bit (0.125V LSB) Output current: 300μA max Ripple noise: Less than 50mVp-p @6.5kV Stability: 10ppm/1hr after 1hr warm up temperature coefficient: 5ppm/℃ Grid electrode supply (Referenced to Accelerator) optional Output voltage: +0.2kV~-5.12kV Absolute voltage accuracy: Less than 0.1% Set ability: 16bit (0.125V LSB) Output current: 100μA max FUTEX CO., LTD. http://www.futex.jp Ripple noise: Less than 50mVp-p @5.12kV TEL:+81-42-549-2888 FAX:+81-42-549-2900 Stability: 10ppm/1hr after 1hour warm up 2-28-3 Fukujima-cho Akishima Tokyo, Japan temperature coefficient: 5ppm/℃ Update: Jun,19, 2012