Custom multiple output power supply for “TFE-type CD-SEM, Review SEM” .
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| ドキュメント名 | Custom multiple output power supply for “TFE-type CD-SEM, Review SEM” . |
|---|---|
| ドキュメント種別 | 製品カタログ |
| ファイルサイズ | 40.7Kb |
| 取り扱い企業 | フューテックス株式会社 (この企業の取り扱いカタログ一覧) |
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Model : FE103XP Custom multiple output power supply
for “TFE-type CD-SEM, Review SEM” .
Application
・ CD-SEM
・ Review SEM
＊ This picture is an example adopted as CD-SEM.
・Wafer inspection SEM
Product specifications
Input voltage
90V～240VAC single phase 1.5A(50,60HZ) The other specifications
Accelerator supply (Referenced to GND) All the outputs provide with the over voltage
Output voltage: -0.1kV~ -10kV protection and the over current protection.
Absolute voltage accuracy: Less than ±0.5%
Set ability: 16bit (0.5V LSB) External control: Optical isolated RS232C
Output current: 1mA max Interlock: vacuum, thermo, HV-connection
Ripple noise: Less than 100mVp-p@10kV HV connector: Customer specification
Stability: 10ppm/1hr after 1hour warm up Output monitor: Accelerating voltage, Lens voltage
temperature coefficient: 5ppm/ Storage temp range: -5℃~ +40℃℃
Filament supply (Referenced to Accelerator) Operating temperature
Constant current control Limit: +10℃~ +40℃
Humidity: 80% or less
Set ability: 16bit (1mA LSB)
Insulation method: Air insulation (one molding)
Output current: 0~3.2A Externals size: 480mm(W) × ---(D) × --- (H)
Ripple noise: Less than 5mA p-p @3A Weight: ≧20kg～
Absolute current accuracy: ±0.01A
Stability: 20ppm/1hour @ 3.0A
The model “FE103XP” is an integrated
temperature coefficient: 10ppm/℃
multiple output high voltage power
Suppressor supply (Referenced to Accelerator)
supply specifically developed for TFE
Output voltage: -0.03kV~ -0.5kV
type scanning electron microscope.
Absolute voltage accuracy: Less than 0.5% @300V
Set ability: 16bit (0.01V LSB)
Output current: 150 A max ＊ Please ask details. μ
Ripple noise: Less than 50mVp-p e-mail info@futex.jp
Stability: 50ppm/1hr after 1hour warm up
temperature coefficient: 25ppm/℃
Extractor supply (Referenced to Accelerator)
Output voltage: +0.2kV~+5.2kV
Absolute voltage accuracy: Less than 0.5%
Set ability: 16bit (0.1V LSB)
Output current: 1mA max
Ripple noise: Less than 50mVp-p @4.0kV
Stability: 20ppm/1hr after 1hour warm up
temperature coefficient: 10ppm/℃
Electric static lens supply (Referenced to Accelerator) optional
Output voltage: +0.3K~+12kV
Absolute voltage accuracy: Less than ±0.5%
Set ability: 16bit (0.1V LSB)
Output current: 200μA max FUTEX CO., LTD. http://www.futex.jp
Ripple noise: Less than 50mVp-p TEL:+81-42-549-2888 FAX:+81-42-549-2900
Stability: 20ppm/1hr after 1hour warm up 2-28-3 Fukujima-cho Akishima Tokyo, Japan
temperature coefficient: 10ppm/℃
Update: Aug,28, 2012