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ガラス基板の上に一体で様々な回路、形状、リムを形成。
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| ドキュメント名 | 光学・MEMSパッケージ用ガラスキャップ |
|---|---|
| ドキュメント種別 | 製品カタログ |
| ファイルサイズ | 170.1Kb |
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| 取り扱い企業 | エーディーワイ株式会社 (この企業の取り扱いカタログ一覧) |
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このカタログ（光学・MEMSパッケージ用ガラスキャップ）の内容
Page 1:Lithoglas®– Optical Cavity WindowsDesign GuidelineSlim Cavity Window – deposited glass dam on almost arbitrary lid materialtyp. application: image sensor or opticaldetector packagingLid Material Borosilicate Glass / Fused Silica / othersoptical coatings feasibleLid Thickness ≥ 300 µm, ≤ 1100 µmDam Material Borosilicate GlassDam / Cavity height ≤ 20 µmDam width ≥ 50 µmSide Wall Angle of Dam ~ 60°Lateral Cavity Size ≥ 100 µmLateral Cavity Shape arbitraryLateral Cap Size ≥ 500 µmHigh Cavity Window – silicon dam on glass lid materialtyp. application: HB-/UV-LED or opticaldetector packagingLid Material Borosilicate Glass / Fused Silicaoptical coatings feasibleLid Thickness ≥ 200 µm, ≤ 1100 µmDam Material SiliconDam / Cavity height ≥ 50 µm, ≤ 700 µmMin. Dam width ≥ 100 µmSide Wall Angle of Dam ~ 55°Lateral Cavity Size ≥ 500 µmLateral Cavity Shape rectangularLateral Cap Size ≥ 1000 µmReflector Cavity Window – silicon dam with reflective overcoat on glass lid materialtyp. application: HB-/UV-LED packagingLid Material Borosilicate Glass / Fused Silica*optical coatings*(*under development)Lid Thickness ≥ 200 µm, ≤ 1100 µmDam Material Silicon with Aluminum OvercoatDam / Cavity Height ≥ 50 µm, ≤ 700 µmMin. Dam Width ≥ 100 µmSide Wall Angle of Dam ~ 55°Lateral Cavity Size ≥ 500 µmCavity Shape rectangularLateral Cap Size ≥ 1000 µmEtched Cavity Window – full glass window made of glass lid materialtyp. application: HB-LED packagingLid Material Borosilicate Glassoptical coatings feasibleLid Thickness ≥ 200 µm, ≤ 700 µmDam Material Borosilicate GlassDam / Cavity Height ≤ 400 µmDam Width ≥ 50 µmSide Wall Angle of Dam ~ 90°Lateral Cavity Size ≥ 800 µmCavity Shape rectangular / roundCavity Surface Roughness < 100 nmLateral Cap Size ≥ 1000 µmAll windows are available as single pieces or in array format.For additional information or differing specifications please contact us:info@lithoglas.de / 49 30 46403 618MSG Lithoglas GmbH Page 1 of 2Maria-Reiche-Str. 1, 01109 Dresden, Germany rev. QZPUWP
Page 2:Lithoglas®– Optical Cavity WindowsDesign GuidelineHigh Cavity Window – glass dam on glass lid material (under development / tentative spec.)typ. application: Opto packagingLid Material Borosilicate Glass / Fused Silicaoptical coatings feasibleLid Thickness ≥ 300 µm, ≤ 1000 µmDam Material Borosilicate Glass / Fused SilicaDam / Cavity Height ≥ 300 µm, ≤ 1000 µmDam Width ≥ 500 µmSide Wall Angle of Dam ~ 80-90°Lateral Cavity Size ≥ 1000 µmCavity Shape rectangular / roundCavity Side Wall Roughness > 1 µmLateral Cap Size ≥ 2000 µmAll windows are available as single pieces or in array format.For additional information or differing specifications please contact us:info@lithoglas.de / 49 30 46403 618MSG Lithoglas GmbH Page 2 of 2Maria-Reiche-Str. 1, 01109 Dresden, Germany rev. QZPUWP