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精密微細加工・非熱加工用、ピコ秒/フェムト秒レーザ:PicoBlade 2

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PicoBlade(R) 2 Picosecond Micromachining Laser

Precision and flexibility for optimized processes—a fully featured, machine-ready system

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ドキュメント名 精密微細加工・非熱加工用、ピコ秒/フェムト秒レーザ:PicoBlade 2
ドキュメント種別 製品カタログ
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PicoBlade® 2 Picosecond Micromachining Laser Precision and flexibility for optimized processes—a fully featured, machine-ready system www.lumentum.com Data Sheet
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PicoBlade Gen 2 Picosecond Micromachining Laser The PicoBlade 2 laser system is a versatile tool for processing virtually any material with the highest precision and reliability. The newly redesigned PicoBlade platform provides the same Features flexibility as the former generation in a much smaller package to • Compact industrial design facilitate the integration and help reduce the footprint of your • High-volume manufacturing machine. The PicoBlade system consists of a laser head, an electronic controller and a closed-loop water chiller. The optical components are • Fully-detachable umbilical contained in a hermetically-sealed and temperature-stabilized • Easy integration housing giving the laser its robustness and ensuring excellent • High productivity: long-term stability. − Wide range of PRF from single shot to 8 MHz standard − A/D power modulation capability The laser head incorporates an ultra-stable, passively mode-locked − FlexBurst™ technology seed oscillator that relies on Lumentum-proprietary, wear-and-tear free semiconductor saturable absorber mirror (SESAM®) technology. − Process shutter and safety shutter SESAMs from Lumentum are designed and optimized for the Picoblade lasers to avoid long-term degradation. The laser is based Options on a master oscillator power amplifier (MOPA) design and is immune • Low and medium power models available to back reflection. Laser head and electronic controller are connected • Customized umbilical lengths via an umbilical that can be disconnected at both ends. The laser offers a wide range of repetition rates with very fine resolution. • AccuTrig™ triggering function Repetition rate changes are possible instantaneously at the push of a • MegaBurst™ high-energy burst button or by sending a corresponding command via computer with • SYNC for high-speed line scanners only negligible changes in spatial beam properties. Applications Pulse-on-Demand (PoD) • Glass cutting, welding, scribing The PoD feature allows the user to select individual pulses by simply • Sapphire cutting, scribing applying a TTL control signal. Its state (high/low) determines whether a given optical pulse exits the laser head. As this gating is done after • Display processing amplification, the energy of the selected pulse is constant even for • High-speed precision metal machining arbitrary pulse sequences. There is no so-called “first pulse” effect. • Selective thin-film ablation Furthermore, the PoD features fast attenuation or modulation by • Semiconductor dicing applying an analog control signal. Attenuation or modulation depth is possible down to a few percent over the whole range of repetition • Hard-materials processing (diamond, sapphire, carbide, rates. ceramics, and CVD) The capabilities of the laser are expanded by the possibility to generate bursts. The FlexBurst technology allows the generation of “micro”-bursts with a temporal pulse spacing of 12 ns. The user can split the energy of a single pulse (single-pulse mode) into a group of pulses (burst mode). In addition, our FlexBurst technology allows the user to freely define the energy of each pulse inside this “micro”- burst, which offers additional degrees of freedom to optimize the machining process. FlexBurst benefits have shown enhanced ablation rate or allowing unique processes to work with transparent materials. Finally PicoBlade is available at the fundamental wavelength of 1064 nm, as well as green (532 nm) and UV (355 nm), all three models coming in the same package size. Based on the proprietary non-linear conversion module architecture, the PicoBlade achieves unparalleled reliability. By default, the conversion efficiency will be optimized at 200 kHz to maximize the energy, but the peak conversion can be engineered at other repetition rates upon request. This is of particular interest for high-speed scanning in the MHz range. Application photography courtesy of Lightmotif B.V. www.lumentum.com 2
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PicoBlade Gen 2 Picosecond Micromachining Laser 50 1064 nm 40 30 532 nm 20 10 355 nm 0 100 1000 10000 Repetition rate (kHz) High-power PicoBlade typical output power versus High-power PicoBlade typical pulse energy versus repetition rate for 1064, 532, and 355 nm* repetition rate for 1064, 532, and 355 nm* Medium-power PicoBlade typical output power Medium-power PicoBlade typical pulse energy versus versus repetition rate for 1064, 532, and 355 nm* repetition rate for 1064, 532, and 355 nm* Low-power PicoBlade typical output power Low-power PicoBlade typical pulse energy versus versus repetition rate for 1064, 532, and 355 nm* repetition rate for 1064, 532, and 355 nm* * The output power for green and UV wavelengths can be optimized at different repetition rates. www.lumentum.com 3 Power (W)
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PicoBlade Gen 2 Picosecond Micromachining Laser Output Beam Profile High-power PicoBlade output beam Medium-power PicoBlade output beam Low-power PicoBlade output beam Dimensions Diagram (mm) 27.5 322.5 352.5 Beam Exit 675 78 989 www.lumentum.com 4 276 177.6 250 139.7
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PicoBlade Gen 2 Picosecond Micromachining Laser Specifications General Laser Head Dimensions (L x W x H) 989 x 276 x 177.6 mm (38.9 x 10.9 x 7.0 in) Exit beam location and reference (W x H) 78 x 139.7 mm (3.1 x 5.5 in) Weight <75 kg (<165 lb) Controller (fits 19-in rack) Dimensions (L x W x H) 399 x 483 x 133 mm (3RU) Weight 14 kg (30.9 lb) Chiller (fits 19-in rack) Dimensions (L x W x H) 640 x 483 x 267 mm (6RU) Weight 42 kg (92.6 lb) Parameter Output power PicoBlade High-power See graphs on page 3 for typical values PicoBlade Medium-power PicoBlade Low-power Repetition rate Single shot to 8 MHz Pulse energy stability (>1 kHz) <0.75% rms for 1064 nm <1% rms for 532/355 nm Pulse width measured at 1064 nm 10 ps Spatial mode TEM 200, M <1.3 Pointing stability over constant temperature +/-2°C <50 μrad/ °C Warm up from cold start <40 min Voltage (single phase) 100 – 240 V AC Frequency 50 – 60 Hz Input power (single phase)* 2400 VA Polarization >100:1 linear horizontal *Laser controller and chiller Regulatory Compliance The products listed in this datasheet comply with the following regulatory standards, and display the certification and laser safety markings shown below. Contact your local Lumentum sales representative for additional information on specific products or configurations. Regulatory Standards IEC/EN 61010-1 IEC/EN 60825-1 IEC/EN 61000-6-2 IEC/EN 61000-6-4 CDRH 21 CFR 1040.10 Safety certification markings Laser safety warning label www.lumentum.com 5
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Ordering Information Example of a Complete Order For more information on this or other products and their availability, PB2-H-0200-R-0000R (high power and 1064 nm) please contact your local Lumentum account manager or Lumentum directly at customer.service@lumentum.com. PB2-PS-H-0000 (controller) PB2- - - - 0000R PB2-PS-A30R (3 m umbilical cable) Power Level Code PRF Code NLO Code CH-M-A220 (chiller, air-water, European with 220 V AC) High H 50 kHz 0050 1064 nm R Medium M 200 kHz 0200 532 nm G PB2-CH-A30S (3 m chiller hoses) Low L 355 nm V Energy* E Accessories Description Product Code Controller Controller PB2-PS-H-0000 Chiller Water-water, US with 110 V AC CH-M-W110 Water-water, European with 220 V AC CH-M-W220 Air-water, US with 110 V AC CH-M-A110 Air-water, European with 220 V AC CH-M-A220 Umbilical Cable 3 m standard PB2-PS-A30R 5 m standard PB2-PS-A50R Chiller Hoses 3 m chiller hoses PB2-CH-A30S 5 m chiller hoses PB2-CH-A50S Accessories ZeroAir generator (only UV) PB-ZA AccuTrig AT-0000R SYNC SC-0000R * For inquiries about MegaBurst option, please contact Lumentum. North America Toll Free: 844 810 LITE (5483) Outside North America Toll Free: 800 000 LITE (5483) China Toll Free: 400 120 LITE (5483) © 2017 Lumentum Operations LLC Product specifications and descriptions in this document are subject to change without notice. www.lumentum.com picoblade2-ds-cl-ae 30176136 902 0417