小型高精度ヘキサポッドステージ BORA
BORA ヘキサポッドは、0.1 µm の分解能で精密要素の位置決めと調整を行うためのコンパクトな 6DOF 平行運動学システムです。 BORA ヘキサポッドは、解像度、精度、安定性、サイズの点で光学およびナノテクノロジーの最も厳しい基準を満たしています。 その寸法により、例えばシンクロトロンビームラインでのアプリケーション用のゴニオメーターの先端や、宇宙光学系の位置合わせと校正を行う光学地上支援装置など、狭い環境での統合が可能になります。 BORA ヘキサポッドは、垂直、水平、逆さなど、あらゆる向きで使用できます。
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| ドキュメント名 | 小型高精度ヘキサポッドステージ BORA |
|---|---|
| ドキュメント種別 | 製品カタログ |
| ファイルサイズ | 285Kb |
| 取り扱い企業 | オーテックス株式会社 (この企業の取り扱いカタログ一覧) |
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このカタログの内容
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BORA hexapod
High resolution hexapod small size
KEY FEATURES
■ Payload capacity up to 10 kg
■ Linear travel range ± 20 mm
■ Angular travel range ± 15 °
■ Height in middle position 145 mm
APPLICATIONS
■ Instrumentation ■ Optics ■ Testing laboratories ■ Synchrotrons
■ Aeronautics and spatial ■ Metrology ■ Semiconductors
This hexapod places a sample at the centre of two large Alignment of a mirror with high precision on a
rotation stages. With this installation, hexapod mounting space telescope. When the hexapod has correctly
orientation varies between 0° and 90°. Advantages of the positioned the mirror, the user fixes the mirror and
hexapod are: high stability, stiffness and repeatability of takes the hexapod off the structure.
the sample position with respect to the rotation stages
independently of their orientations.
Two BORA hexapods position Kirkpatrick-Baez (KB) Some HV BORA hexapods are positioning the high
mirrors with high stability and resolution to improve the reflectivity mirrors of a Fabry-Perot cavity in order to
beam quality on a synchrotron beamline. optimize their alignment and thereby the cavity finesse.
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BORA
Motion and positioning
Travel range Tx, Ty (mm) ± 20
Travel range Tz (mm) ± 10
Travel range Rx, Ry (deg) ± 10
Travel range Rz (deg) ± 15
Resolution Tx, Ty, Tz (µm) 0.1
Resolution Rx, Ry, Rz (µrad) 2
Repeatability Tx, Ty, Tz (µm) ± 0.4
Repeatability Rx, Ry, Rz (µrad) ± 3.2
Speed Tx, Ty (mm/s) 2
Speed Tz (mm/s) 1
Speed Rx, Ry (deg/s) 1
Speed Rz (deg/s) 2
Mechanical properties
Stiffness X, Y (N/µm) 1
Stiffness Z (N/µm) 10
Payload capacity (kg)
10 / 5
(vertical orientation / horizontal orientation)
Motor type DC motor, gearhead
Miscellaneous
Operating temperature range (°C) 0 to + 50
Materials Aluminum, steel, stainless steel
Size mobile platform (mm) Ø 160
Central aperture (mm) Ø 43 for mobile platform ; Ø 36 for fixed platform
Height in middle position (mm) 145
Mass (kg) 4.3
Cable length (m) 3
Clean room compatibility
Vacuum compatibility
Options Low temperature compatibility down to -40°C
Virtual homing
Hand-held control unit
Controller
Controller type NAOS or ALPHA+ if cable length > 20 m or temperature < 0°C
Interface Ethernet
Power supply 110-240 VAC / 50-60 Hz
The performances are specified for single axis motions, with all other axes at midrange and for a rotation center in the middle of the mobile platform.
Ø 210
y
z
x
x
Hexapod in middle position
10 Allee Charles Babbage - 30000 Nimes - France
+33 4 66 29 43 88 - contact@symetrie.fr - www.symetrie.fr
145
Datasheet subject to change without notice. All data are superseded by any new release. R230418