高安定高精度ヘキサポッドステージ KUBAN
KUBAN は、高精度かつ 1.5 µrad の分解能で空間内に要素を配置するように設計された、非常に安定した 6DOF システムです。 高分解能アクチュエータと高精度球面ジョイントの構成と統合により、最大 500 kg の耐荷重で分解能と再現性の高いパフォーマンスを実現できます。
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| ドキュメント名 | 高安定高精度ヘキサポッドステージ KUBAN |
|---|---|
| ドキュメント種別 | 製品カタログ |
| ファイルサイズ | 433.5Kb |
| 取り扱い企業 | オーテックス株式会社 (この企業の取り扱いカタログ一覧) |
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このカタログの内容
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KUBAN hexapod
High resolution heavy payload medium size
KEY FEATURES
■ Height 600 mm
■ Resolution 1.5 µrad
■ Repeatability ± 2.5 µrad
■ Payload capacity up to 500 kg
■ Absolute linear encoders
APPLICATIONS
■ Synchrotrons: mirror or chamber supports ■ Optics
This KUBAN hexapod aligns a mirror inside KUBAN hexapod aligns a polarimeter with high KUBAN hexapod positions a mirror inside of a
a vacuum chamber on LUCIA beamline at precision in a short time. This installation made by vacuum chamber with high resolution. To be sure
Synchrotron SOLEIL. A high stability over time is TOYAMA can be moved to be used on different to avoid harming any part due to an unexpected
crucial. beamlines at MAX IV Laboratory synchrotron. over range, an inclination limit switch is installed
under the hexapod mobile platform and stops the
motion if the maximum roll angle is reached.
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KUBAN
Motion and positioning
Travel range Tx, Ty (mm) ± 75
Travel range Tz (mm) ± 45
Travel range Rx, Ry (deg) ± 5
Travel range Rz (deg) ± 10
Resolution Tx, Ty (µm) 0.2
Resolution Tz (µm) 0.1
Resolution Rx, Ry (µrad) 1.5
Resolution Rz (µrad) 2
Repeatability Tx, Ty (µm) ± 0.5
Repeatability Tz (µm) ± 0.25
Repeatability Rx, Ry (µrad) ± 2.5
Repeatability Rz (µrad) ± 4
Speed Tx, Ty (mm/sec) 0.9
Speed Tz (mm/sec) 0.4
Speed Rx, Ry (deg/sec) 0.12
Speed Rz (deg/sec) 0.3
Mechanical properties
Payload capacity (kg)
500
(vertical orientation)
Motor type Stepper motor
Encoder type Absolute linear encoder
Miscellaneous
Operating temperature range (°C) 0 to + 50
Material Aluminum, steel, stainless steel
Size mobile platform (mm) Ø 450
Central aperture (mm) Ø200 form mobile platform ; Ø280 for fixed platform
Height in middle position (mm) 600
Mass (kg) 140
Cable length (m) 5
Clean room compatibility
Higher speed with brushless or DC motor
Options
Heavier payload
Hand-held control unit
Controller
Controller type ALPHA+
Interface Ethernet
Power supply 110-240 V AC 50-60 Hz
The performances are specified for single axis motions, with all other axes at midrange and for a rotation center in the middle of the mobile platform.
z
Ø 600
x y
x
Hexapod in middle position
10 Allee Charles Babbage - 30000 Nimes - France
+33 4 66 29 43 88 - contact@symetrie.fr - www.symetrie.fr
600
Datasheet subject to change without notice. All data are superseded by any new release. R230418