BREVA は、高い角度精度を提供するように特別に設計されています。 XYZ0.5 µm 、回転 2.5 µrad の分解能で、サンプル、プローブ、センサーなどの物体の角度位置決めが可能です。垂直、水平、逆さなど、オリエンテーションフリーで使用できます。
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| ドキュメント名 | 高精度ヘキサポッドステージ BREVA |
|---|---|
| ドキュメント種別 | 製品カタログ |
| ファイルサイズ | 310.8Kb |
| 取り扱い企業 | オーテックス株式会社 (この企業の取り扱いカタログ一覧) |
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BREVA hexapod
High resolution hexapod medium size
KEY FEATURES
■ Payload capacity up to 200 kg
■ Linear travel range ± 75 mm
■ Angular travel range ± 22 °
■ Absolute encoders
APPLICATIONS
■ Instrumentation ■ Optics ■ Testing laboratories
■ Aeronautics and space ■ Metrology ■ Synchrotrons
This hexapod integrates a 360° rotation in its mobile Diffractometer with BREVA hexapod on CEA BM32 beamline at ESRF
platform. It orientates a microwave source to qualify synchrotron for the development and analysis of nanomaterials.
microwave antennas.
This hexapod positions a vacuum chamber containing a gas This hexapod is coupled to a Tz elevation stage in order to achieve larger
sample and offers a ± 20° angular range. travel range for space optical calibration.
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BREVA
Motion and positioning
Travel range Tx, Ty (mm) ± 75
Travel range Tz (mm) ± 50
Travel range Rx, Ry (deg) ± 20
Travel range Rz (deg) ± 22
Resolution Tx, Ty, Tz (µm) 0.5
Resolution Rx, Ry, Rz (µrad) 2.5
Repeatability Tx, Ty, Tz (µm) ± 0.5
Repeatability Rx, Ry, Rz (µrad) ± 2.5
Speed Tx, Ty (mm/s) 6
Speed Tz (mm/s) 4
Speed Rx, Ry (deg/s) 1.5
Speed Rz (deg/s) 2.25
Mechanical properties
Stiffness X, Y (N/µm) 5
Stiffness Z (N/µm) 32
Payload capacity (kg)
200 / 80
(vertical orientation / horizontal orientation)
Motor type Stepper motor, gearhead
Encoder type Absolute encoder
Miscellaneous
Operating temperature range (°C) 0 to + 50
Material Aluminum, steel, stainless steel, plastic
Size mobile platform (mm) Ø 289
Central aperture (mm) Ø120 form mobile platform ; Ø250 for fixed platform
Height in middle position (mm) 350
Mass (kg) 34
Cable length (m) 3
Clean room compatibility
Options
Hand-held control unit
Controller
Controller type ALPHA+
Interface Ethernet
Power supply 110-240 VAC / 50-60 Hz
The performances are specified for single axis motions, with all other axes at midrange and for a rotation center in the middle of the mobile platform.
Ø 606
y
z
x
x
Hexapod in middle position
10 Allee Charles Babbage - 30000 Nimes - France
+33 (0)4 66 29 43 88 - contact@symetrie.fr - www.symetrie.fr
350
Datasheet subject to change without notice. All data are superseded by any new release. R230418