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XHV gauge head:3B-Gauge

Product Catalog

Ultra-low outgassing vacuum component - Measurable as low as 10-12Pa(~10-14Torr)

- Reduction of soft X-ray & ESD by Bent Belt-Beam method.
- Full-closed cylindrical cage-grid with an axial-slit.
- Low outgassing hot-cathode gauge by using 0.2%BeCu alloy body.

Document Information

Document Title XHV gauge head:3B-Gauge
Document Type Product Catalog
File size 368.1Kb
Company 東京電子株式会社 (Documents List)