Piezo Nanopositioning　From Design to Production

Piezo Nanopositioning From Design to Production nanoFAKTUR kkkkkkkkk piezo . positioning . systems

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Table of Contents Applications and Markets 4 Piezo-Knowledge 5 MPa Piezo-Stacks 8 HPa Encapsulated Piezo-Actuators 9 PPa Parallel Levers 1 0 DPa Double Levers 11 C1a X-Stages 100/250µm 12 C1a X-Stages 600µm 13 LPa Linear Stages 14 LPa Long Range Linear Stages 15 CPa Z-Stages 100/250µm 16 CPa Z-Stages 500µm 17 SPa Microscopy Sample Z-Stages 18 SPa Microscope-Inserts 19 SFa QuickFocus 20 SFa SlimFocus 21 SFa RangeFocus 22 C2a XY-Stages 100/250µm 23 C2a XY-Stages 600µm 24 L2a XY-Stages with Aperture 300/600µm 25 L2C XY-Stages with Capacitive Sensors 26 L2a XY-Stage 1x1mm2 27 C3a Cube 100/250µm 28 C3a Cube 600µm 29 C3C Tick Cube 30 L3C XYZ-Stages with Capacitive Sensors 31 L3a XYZ-Stages 32 T2x Tip/Tilt Platform 34 Valve-Drives 35 Custom Piezo-Systems 36 ExO Piezo Driver 38 ExD-060100 Digital Controllers 39 EBD-1202x0 Digital Controllers 40 Software 41 Persons and Governance 42 Expertise 43

Applications and Markets Jacques and Pierre Curie discovered is the actuator-effect, one year later. for e.g. maritime sonars, force-sensors the piezo-electric effect in 1880. Both piezo-effects have rapidly con- and ultrasonic parking-sensors. Certain solid-state materials gene- quered applications and markets since nanoFaktur´s expertise is about piezo- rate electric charge when set under 1954, when the ideal material PZT materials, sensors and mainly about pressure (sensor-effect). The brothers (lead-zirconate-titanate) was found. actuation and positioning. described the inverse effect, which The sensor-effect of PZT is being used Here are some of the manifold of applications and markets for PZT-actuators and -positionings: Beam-Steering Surface-Inspection SEM Lithography Nano-Indentation Semi-Conductor Disc-Drive-Test Dispensing Optical Trapping Inspection-Systems Z-Stacking Interferometry White-Light-Interferometers Dithering Pixel-Interpolation Sample-Scanning Wafer-Stages Nano-Alignment Autofocus AFM 4

Piezo-Knowledge Properties of PZT d33 Elements Electrode PZT solid-state ceramics must be polarized to exhibit a piezo-effect. At nanoFaktur, we mostly use the versatile d33-coupling. This coupling means, that polarization, electrical field and the desired expansion are all in parallel. Typical d33 Disc In order to save voltage, the PZT-elements are manufactured to be thin. Stacking them means multiplying the strokes (multilayer-technology). Cuboid d33 Multilayer Piezo-Stack Open Loop A typical d33 PZT-element has the following expansion characteristics in field-direction: Typical Voltage BTyepihcaal Vvoioltarg oe Bf enhaavnioor oFfa nkantouFra kMtuPr MOP-O0-50500005500 60,00 50,00 40,00 30,00 25 mHz Curve Virgin Curve 20,00 10,00 0,00 -10,00 0 20 40 60 80 100 120 140 160 Voltage [V] Another feature is the drift of position over time (1% per decade): 60 51 µm 51,5 µmΔl/µm 50 µm 50,5 µm 50 40 30 20 If the application of a piezo-actuator 10 can do with those effects, just a driver supplying electrical power is needed. 0 0,01 0,1 1 10 t/s 100 This mode is called “open-loop”. 5 Displacement [um]

Closed Loop If stable and repeatable posi- tioning is required, PZT-drives are combined with position- sensors. Actuators and sensors are connected in a circuit with electronics, which periodically compare commanded positions with actual positions to gene- rate corrected voltages for the actuators. The standard P-I-D calculation method is typically applied. It can be optimized by additional algorithms, if digital controllers are used. Position-Controls Integration of Piezo-Stacks Piezo-stacks can generate pres- using application-adequate sures of up to 50 MPa. Which preloads (2 to 30 MPa) and means for example, that a stack mechanical decoupling. High with 5x5 mm cross-section can preload-pressures increase generate 1250 N of force. On strokes: E.g. +30% at 25 MPa. the other hand, they are not Spring-constants cs of the pre- able to bear much pulling-force, load reduce strokes if they are lateral force or torque. This is in the same magnitude as the due to the laminated structure. stiffnesses cT of the stacks. So, integration is optimally done Relevant equations: Force and Stroke Piezo-actuators generate force F and expansion Δl when voltage U is applied. The blocking-force FB is delivered when an actuator is fully inhibited in expansion. The nominal displacement Δl0 is provided when actuators do not have to generate more force than initially applied. Work-Space of a Multilayer Piezo-Stack 6

Dynamic Considerations Piezo-Stacks can be mechanically regarded as controllable springs. The spring-constant is the stiffness. Stacks with their own masses m (relevant: 1/3 of the stacks´ mass) plus external loads M are spring-mass systems and behave like those. m + M = meff. Relevant equations: Driving Power and Heating Piezo-Stacks are made like ceramic capacitors and mainly behave like those electrically. There is a specialty to mind: The capacitances of piezo-ceramics are depending on the amplitudes of driving voltages. The nominal capacitances C0 are given at U = 1V, f = 1 kHz sine-wave. The effective capacitances C increase continuously with voltages to about 80% higher at the maximum voltages. Relevant equations: 7

MPa Piezo-Stacks The latest industry-standard . Higher Displacements . Longer Lifetimes . Tighter Tolerances MPa stacks deliver strain of up to 2 ‰! The consequently laminated structures and monolithic sintering guarantee best possible dimensional tolerances and straightness of motion. Micro-cracks and pillow-effect are excluded by µm- precise drawn back electrodes in com- bination with an elastic isolation. The life-time of MPa stacks is outstanding and industry-standard. Product-Number MPO-050015 MPO-050030 MPO-050050 MPO-050100 Un it Expansion (0..150 V) 15 30 45 90 µm Expansion (-45..180 V) 24 48 69 138 µm Expansion at 800 N Preload +20% Max. Pressure 50 MPa Stiffness 75 38 25 12 N/µm Resonance, unloaded 90 65 52 37 kHz el. Capacitance 1.1 2.2 3.3 6.6 µF Cross Section, End-Pieces, A 5.0 x 5.0 mm Cross-Section incl. Contacts and Insulation 6.0 x 6.0 mm Length, L 10 20 30 60 mm Parallelism/Flatness 2 µm Operation-Temperature (Stack) -40..+180 °C Options: - Spherical End-Pieces - Connection Wires, PTFE, 200 mm - Housing, Encapsulation, Preload - Suitable Electrical Driver, e.g. EBO-050100 8

HPa Encapsulated Piezo-Actuators Direct-Drives, ready to use HPa piezo-actuators incorporate stacks for direct and stiff actuation inside stainless-steel encapsulati- ons. A preload of 100 N allows for high-dynamic oscillations. Integra- ted position-sensors are optional. Water-proof versions are available. HPa have decisively shorter lengths than other products on the market. Product-Number HPa-b50015 HPa-b50030 HPa-b50050 HPa-b50100 HPa-b50150 Unit Expansion (0..150 V) 15 30 45 90 135 µm Expansion (-45..180 V) 22 44 67 134 216 µm Push/Pull, max. 1000/100 N Stiffness 70 37 25 15 10 N/ µm Torque, max., head-piece to body 0.4 Nm Resonance, unloaded 20 16 12 9 7.3 kHz el. Capacitance 1.1 2.2 3.3 6.6 9.9 µF Overall Length, L 24 34 44 74 104 mm Material, Encapsulation, Endpieces stainless steel Operating-Temperature -40..+80 °C Connection Wire, 1.5 m, w/o Socket a=P, e.g. HPO-P50015 Connection Wire, 1.5 m, w/ Lemosa a=L, e.g. HPO-L50015 Options: - Versions with position-sensors - Versions with 60 V max. voltage - Spherical End-Pieces - Suitable Electrical Drivers, e.g. EBO-050100 9

PPa Parallel Levers Up to 1mm Travel with Guidance The high strain of our MPO stack-actua- tors allows for smaller constructions at the same displacements. PPa levers are equipped with electro-eroded flexures. Flexures avoid friction (wear, non-accu- racies) and micro-cracks, which would reduce life-time. The moving platforms are being guided in parallel. Thus PPO and PPS are not just simple drives, but also guidances. The PPS versions are equipped with strain-gage sensors, which care for temperature-compensa- ted measurement and control. Product-Number PPa-b00100 PPa-b00250 PPa-b00500 PPa-b01000 Unit Displacement (0..150 V) 100 250 500 1000 µm Displacement (-45..180 V) 145 365 730 1400 µm Resolution, open loop 0.2 0.3 0.5 1 nm Resolution, closed loop 2 6 12 25 nm Linearity, closed loop 0.1 0.2 % Repeatability 7 10 30 60 nm Push/Pull, maximum 50/20 30/15 N Lateral Force, maximum 40 30 N Stiffness 0.85 0.5 0.22 0.11 N/µm Resonance, unloaded 850 600 340 210 Hz El. Capacitance 1.2 3.6 4.8 8.4 µF Body-Material stainless-steel Lenght L 45 59 69 99 mm Hight H 20 20 22.5 22.5 mm Operating Temperature -20..80 °C Product-Name: PPa-b….. a = O for the open-loop version a = S for the version with position-sensor b = P for pigtails (wires without socket) b = L for Lemosa-socket (option for the open-loop version) b = D for DSub-socket, 15 pins (option for the version with sensor) Options: - Vacuum-Compatibility - Suitable driver, open-loop, EBO-050100 - Suitable controller, closed-loop, EBD-060100 10

DPa Double Levers Up to 1mm driven by Piezo The large strain of our MPO stacks allows for the compact constructions of our DPa lever-drives. The guidances and joints are made of electro-eroded fle- xures, which are avoiding friction, wear and micro-cracks. The life-times are in the order of 10 billion full-stroke cycles. The versions DPS are equipped with strain-gage sensors full-bridges for temperature-compensated measure- ment and controls. Product-Number DPa-b00075 DPa-b00100 DPa-b00250 DPa-b00500 DPa-b01000 Unit Displacement (0..150 V) 75 100 250 500 1000 µm Displacement (-45..180 V) 105 140 330 700 1400 µm Resolution. open loop 0.15 0.2 0.3 0.5 1 nm Resolution. closed loop 1.5 2 6 12 25 nm Linearity. closed loop 0.1 0.2 % Repeatability 6 7 10 30 60 nm Push/Pull. maximum 200/30 150/10 100/10 N Stiffness 4.5 3.2 0.55 0.37 0.15 N/µm Resonance. unloaded 1150 1000 550 300 200 Hz El. Capacitance 2.2 3.3 3.3 6.6 9.9 µF Body-Material stainless-steel Lenght c 30 48 48 82 112 mm Height a 16 23 23 26 26 mm Operating Temperature -20..+80 °C Product-Name: DPa-b….. a = O for the open-loop version a = S for the version with position-sensor b = P for pigtails (wires without socket) b = L for Lemosa-socket (option for the open-loop version) b = D for DSub-socket. 15 pins (option for the version with sensor) Options: - Vacuum-Compatibility - Suitable driver. open-loop. EBO-050100 - Suitable controller. closed-loop. EBD-060100 11

C1a X-Stages 100/250µm High Dynamics and Small C1a 100/250 stages offer long dis- placements at small dimensions. Two different ranges are available: 100 and 250 µm. The 100 µm stage is stiff and so has a high first resonance. It can be used well for dynamic applications. The other version offers 250 µm of range, which is unique at such small dimensions. Both versions are sized 40x40x20 mm3 only. Product-Number C1O-L00100 C1S-D00100 C1O-L00250 C1S-D00250 Unit Position-Sensor SGS SGS Range (-45..180 V) 130 130 330 330 µm Range, closed loop 100 250 µm Resolution, open loop 0.5 0.5 1 1 nm Resolution, closed loop 1 3 nm Linearity, closed loop 0.2 0.2 % Repeatability, closed loop 10 25 nm Load 500 150 g Push/Pull 15/10 N Stiffness 1.5 0.4 N/µm Lowest Resonance, unloaded 370 210 Hz Lowest Resonance, w/ load 30g 310 190 Hz El. Capacitance 2.2 µF Body-Material aluminum, stainless steel Operating Temperature -20..+80 °C Options: - Vacuum-Compatibilityand/or Non-Magnetic - Suitable driver, open-loop, EBO-050100 - Suitable controllers, closed-loop, EBD-060100 12

C1a X-Stages 600µm Long Range and Small C1a 600 stages offer up to 900 µm range at smallest dimensions. The size is 60x60x21.5 mm3 only. The stages are available with or without sensors. The version with sensor allows for repea- table and drift-less positioning. Target positions can be reached in 10 ms magnitude. The linearity of positioning is better than 0.2%. Versions for UHV and high magnetic fields are available. Product-Number C1O-L00600 C1S-D00600 Unit Position-Sensor SGS Range (-45..180 V) 900 900 µm Range, closed loop 600 µm Resolution, open loop 4 4 nm Resolution, closed loop 6 nm Linearity, closed loop 0.2 % Repeatability, closed loop 50 nm Load, max. 200 g Push/Pull, max. 50/20 N Stiffness 0.15 N/µm Lowest Resonance, unloaded 190 Hz El. Capacitance 4.4 µF Body-Material aluminum, stainless steel Operating Temperature -20..+80 Options: 1 -Vacuum-Compa2tibility and/or Non-M3 agnetic 4 5 6 7 8 -Suitable driver, open-loop, EBO-050100 -Suitable controller, closed-loop, EBD-060100 A A cable outlet 21.5 9x M2,5 5 B B C C 53 6 30.5 2.9 2.5 45 60 53 D D 13 E cable length: 1.5 m FREIMASSTOLERANZ MAßSTAB BEHANDLUNG RAUHEIT EINHEIT STANDARD TOLERANCE SCALE TREATMENT - UNIT mm DIN ISO 1:1 WERKSTOFF / MATERIAL Ra1.6 PROJECTION 2768 - f - - - - - DATUM NAME BEZEICHNUNG / TITLE - - - - KONSTR. 19.03.2017 KM - - - - GEZ. xx.xx.xxxx KM 1D Piezoantrieb 500 µm - - - - GEPR. - - - - - - All information provided in this drawing is to ARTIKEL-ID / ITEM-NO. VERSION GÜLTIG BIS be considered confidential, proprietary and F - - - - secret information. L1S-D00500 - - It is intended only for the use of the individual - - - - or entity to whom it is sent. Individual or entity agrees to not disseminate or copy this DOKUMENT-ID / DOCUMENT-NO. VERSION GÜLTIG BIS - - - - information to anyone other than originally specified without the written consent of - - - AUS- nanoFaktur GmbH. 1 2 3 4 GABE ÄNDERUNG DATUM NAME www.nFaktur.com, info@nFaktur.com ABGELEITET V. - NACHFOLGER F. - 20 40

LPa Linear Stages High Dynamics and versatile Mounting LPa linear stages are directly driven by piezo-stack actuators. The direct drives keep the first resonances enormously high, so that dynamic applications can be served. Dynamic actuators are opti- mally employed in-line with their loads in order to avoid torque and possible tilt-oscillation. Thus LPa do have an extra piston-platform, so that LPa can be either used as standard X-stages or as piston stages (Z-stages). Product-Number LPa-b0045 LPa-b0090 Unit Displacement (0..150 V) 45 90 µm Displacement (-45..180 V) 70 140 µm Resolution, open loop 0.1 0.2 nm Resolution, closed loop 1 2 nm Linearity, closed loop 0.1 0.2 % Repeatability, closed loop 5 6 nm Push/Pull 200/100 200/100 N Stiffness 21 10 N/µm Resonance, unloaded 3000 2000 Hz El. Capacitance 3.3 6.6 µF Length, a 62 92 mm Body-Material stainless steel Operating Temperature -20..80 1 °C 2 3 4 5 6 7 8 35 Product-Name: LPa-b….. a = O for the open-loop version A 0.75 12 5 movable part A turned 90° a = S for the version with position-sensor movable part b = P for pigtails (wires without socket) b = L for Lemosa-socket (option for the open-loop version) b = D for DSub-socket. 15 pins (option for the version with sensor) 4x M2.5 4 B B Options: - Vacuum-Compatibility - Suitable driver, open-loop, EBO-050100 - Suitable controller, closed-loop, EBD-060100 C C 12 19 cable outlet a [mm] 0.5 LPa-b00045 62 D 3x 3.2 LPa-b00090 92 D 7 4.4 9 6.5 E FREIMASSTOLERANZ MAßSTAB BEHANDLUNG RAUHEIT EINHEIT STANDARD TOLERANCE SCALE TREATMENT - UNIT mm DIN ISO 1:1 WERKSTOFF / MATERIAL Ra1.6 PROJECTION 2768 - f - - - - - DATUM NAME BEZEICHNUNG / TITLE - - - - KONSTR. 12.12.2015 2x M2 3 KM 14 - - - - GEZ. Piezo Linear Stage - - - - GEPR. - - - - - - All information provided in this ARTIKEL-ID / ITEM-NO. VERSION GÜLTIG BIS drawing is to be considered F - - - - confidential, proprietary and secret - - information. - - - - It is intended only for the use of the individual or entity to whom it is sent. DOKUMENT-ID / DOCUMENT-NO. VERSION GÜLTIG BIS - - - - Individual or entity agrees to not disseminate or copy this information - - - AUS- to anyone other than originally 1 2 3 4 GABE ÄNDERUNG DATUM NAME specified without the written consent of nanoFaktur GmbH. ABGELEITET V. - NACHFOLGER F. - www.nFaktur.com, info@nFaktur.com a 21 14.5 15 1 3.5 7 31 5

LPa Long Range Linear Stages High Dynamics and versatile Mounting LPa LR linear stages are driven by amplified piezo-stack actuators, so that long ranges of 100, 300 and 600 µm respectively are achieved at compact dimensions. Linear positio- ning stages in general are optimally employed in-line with their loads in order to reach best positioning re- sults. Thus LPa LR do have an extra piston-platform, so that they can be used either as standard X-stages or as piston stages (Z-stages). Product-Number LPa-b00100 LPa-b00300 LPa-b00600 Unit Displacement (0..150 V) 100 300 600 µm Displacement (-45..180 V) 160 480 960 µm Resolution, open loop 0.5 1.5 3 nm Resolution, closed loop 1 2.5 4 nm Linearity, closed loop 0.2 % Repeatability 10 25 50 nm Push/Pull, maximum 100/20 N Stiffness 1.6 0.3 0.15 N/µm Resonance, unloaded 900 425 225 Hz El. Capacitance 2.2 3.3 8.8 µF Body-Material stainless-steel Operating Temperature -20..+80 1 °C2 3 4 Product-Name: LPa-b….. a = O for the open-loop version A a = S for the version with position-sensor b = P for pigtails (wires without socket) b = L for Lemosa-socket (option for the open-loop version) 25 2 x M3 5 b = D for DSub-socket, 15 pins (option for the version with sensor) 2.9 through all 5 2.5 Piezo stroke Options: - Vacuum-Compatibility B - Suitable driver, open-loop, EBO-050100 - Suitable controller, closed-loop, EBD-060100 C 4x e M2 3 f D 4 x 12 M2 3 15 a b c d e f LPa-b00100 12 19 34 40 15 30 LPa-b00300 15 21 50 50 20 38 E LPa-b00600 15 21 60 60 20 38 FREIMASSTOLERANZ MAßSTAB OBERFLÄCHE RAUHEIT EINHEIT STANDARD TOLERANCE SCALE TREATMENT - UNIT mm DIN ISO Ra1.6WERKSTOFF / MATERIAL PROJECTION 2768 - f 1:1 - - - - - DATUM NAME BEZEICHNUNG / TITLE - - - - KONSTR. 08.06.2017 KM - - - - GEZ. xx.xx.xxxx - Linearversteller - - - - GEPR. - - F - - - - All information provided in this drawing is to be ARTIKEL-ID / ITEM-NO. VERSION GÜLTIG BIS considered confidential, proprietary and secret - - - - information. It is intended only for the use of LPa-b00xxx - - the individual or entity to whom it is sent. - - - - Individual or entity agrees to not disseminate or DOKUMENT-ID / DOCUMENT-NO. VERSION GÜLTIG BIS copy this information to anyone other than - - - - originally specified without the written consent x - - AUS- of nanoFaktur GmbH, VS-Villingen. GABE ÄNDERUNG DATUM NAME www.nFaktur.com, info@nFaktur.com ABGELEITET V. - NACHFOLGER F. - 7 3.75 7.5 a 1.5 16 b c d

CPa Z-Stages 100/250µm Dynamic and Long-Range Lift CPa 100/250 stages offer long dis- placements at small dimensions. Two different ranges are available: 100 and 250 µm. The 100 µm stage is stiff and so has a high first resonance. It can be used well for dynamic applications. The other version offers 250 µm of range, which is unique at such small dimensions. Both versions are sized 40x40x30 mm3 only. Product-Code CPO-L00100 CPS-D00100 CPO-D00250 CPS-D00250 Unit Position-Sensor SGS SGS Range, Open Loop, -45..+180 V 130 130 320 320 µm Range, Closed Loop 100 250 µm Resolution, open loop 0.5 1 nm Resolution, closed loop 1 2.5 nm Linearity, closed loop 0.2 0.2 % Repeatability 10 25 nm Load 500 150 g Push/Pull 15/10 N Lateral Force 10 N Stiffness 1.5 0,2 N/µm Resonance, unloaded 370 210 Hz Resonance, with 100 g load 310 190 Hz Electrical Capacitance 2.2 µF 1 2 3 4 5 6 7 8 Body-Material aluminium, stainless steel 1 Operating Temp2 erature 3 4 -20..+5 80 6 7°C 8 A Spezifikation Wert A Options: -Vacuum-CompatiMbailtietryia lien amagnetischA Spezifikation Al, Ti LWeegr.,t CuBe A -Suitable driver, opeHn-ulbo op, EBO-050100 -Suitable controlleMr,a tcelroiasleiedn am1a0g0n eµtmisch -loop, AEBl, DTi- 0Le6g0.,1 C0u0Be Kabellänge 1,5 m Hub 100 µm Kabellänge 1,5 m B B B B 40 2.8 35 4 x M2.5 5 40 2.8 35 C 4 x M2.5 5 C Kabelabgang C C Kabelabgang 4 x M2.5 5 D 4 x M2.5 5 D D 20 3 D 30 14 20 3 16 30 14 E FREIMASSTOLERANZ MAßSTAB BEHANDLUNG EINHEIT STANDARD TOLERANCE SCALE TREATMENT - RAUHEIT UNIT mm E DIN ISO Ra1.62:1 WERKSTOFF / MATERIAL PROJECTION 2768 - f Al / Ti Leg. / CuBe FREIMASSTOLERANZ MAßSTAB BEHANDLUNG RAUHEIT EINHEIT - - - - STANDARD TDOALTEURMANCE SNCAAMLEE TBREEZAETICMHENNUTNG -/ TITLE UNIT mm - - - - KONDSTRI.N1 9I.1S2.O201 Ra1.67 K2M:1 WERKSTOFF / MATERIAL PROJECTION - - - - GEZ. 276xx8.xx .-x xfxx KPo AZ l P/ iTeiz Loevegr. s/t eCluleBr e -- -- -- -- GEPR. - DATUM -NAME BEZEICHNUNG / TITLE - - - - ARTIKEL-ID / ITEM-NO. VERSION GÜLTIG BIS- - - - KAOll information provided in this drawing is to be NcoSnsTidRe.red1 c9on.f1id2en.t2ia0l, 1pr7oprietKaryM and F -- -- -- -- GseIt E cZre.t informaxtioxn..x x.xxxx KPo ZLP PSie-Dzo9v0e1r0s0te-0lle01r - -is intended only for the use of the individual -- -- -- -- GorE ePntRity. to wh-om it is sent. Individu-al or entity agrees to not disseminate or copy this DOKUMENT-ID / DOCUMENT-NO. VERSION GÜLTIG BIS -- -- -- -- Ainlflo inrmfoarmtioant ioton aspecified witho up nryoovnidee do tihne trh tihsa dnr aowriignign aisll yt o ARTIKEL-ID / ITEM-NO. -VERSION G- ÜLTIG BIS bnaen cooFnaskidtuerr eGdm cbo t th Hnf.i ed ewnrtiitatel,n p croopnrsieetnatr oy fa nd - F -AUS- - ÄNDERUNG - DATUM -NAME wsewcwre.nt Finformation. LPS-D90100-001 - -1 2 3 4 GABE It is intenadketudr .ocnolmy ,f oinr ftoh@e unsFea kotfu trh.ceo imndividual ABGELEITET V. - - - - - NACHFOLGER F. -or entity to whom it is sent. Individual or entity agrees to not disseminate or copy this DOKUMENT-ID / DOCUMENT-NO. VERSION GÜLTIG BIS - - - - information to anyone other than originally specified without the written consent of - - - AUS- nanoFaktur GmbH. 1 2 3 4 GABE ÄNDERUNG DATUM NAME www.nFaktur.com, info@nFaktur.com ABGELEITET V. - NACHFOLGER F. - 30.4 30.4

CPa Z-Stages 500µm High Lift CPa 500 stages offer 500 µm Z-range at smallest dimensions. The size is 60x60x29 mm3 only. The stages are available with or without sensor. The version with sensor allows for repea- table and drift-less positioning. Target positions can be reached in 10 ms magnitude. The linearity of positioning is better than 0.2%. Versions for UHV and high magnetic fields are available. Product-Number CPO-L00500 CPS-D00500 Unit Position-Sensor SGS, Full-Bridge Range, Open Loop (-45..180 V) 600 600 µm Range, Closed Loop 500 µm Resolution, open loop 3 3 nm Resolution, closed loop 5 % Linearity, closed loop 0,2 nm Repeatability 50 nm Push/Pull, maximum 40/20 N Lateral Force, maximum 10 N Stiffness 0.15 N/µm Resonance, unloaded 260 Hz Resonance, with 100 g load 180 Hz Electrical Capacitance 4.4 µF Body-Material aluminum/stainless-steel Connector Lemo DSub15 Operating Temperature -20..+80 °C Options: 1 -Vacuum-Compa2tibility 3 4 5 6 7 8 -Suitable driver, open-loop, EBO-050100 -Suitable controller, closed-loop, EBD-060100 4 x 2.9 DURCH ALLES A 29 6 A 10 cable outlet B B 10 C CPiezo stroke direction 9x M2,5 5 17 D D Laserbeschriftungsansicht nanoFaktur GmbH SN xxxxxxxxxx E cable length: 1.5 m FREIMASSTOLERANZ MAßSTAB BEHANDLUNG RAUHEIT EINHEIT STANDARD TOLERANCE SCALE TREATMENT - UNIT mm DIN ISO 1:1 WERKSTOFF / MATERIAL Ra1.6 PROJECTION 2768 - f - - - - - DATUM NAME BEZEICHNUNG / TITLE - - - - KONSTR. 11.07.2017 KM - - - - GEZ. xx.xx.xxxx KM Piezoantrieb 400 µm - - - - GEPR. - - - - - - All information provided in this drawing is to ARTIKEL-ID / ITEM-NO. VERSION GÜLTIG BIS be considered confidential, proprietary and F - - - - secret information. LPa-b00400 - - It is intended only for the use of the individual - - - - or entity to whom it is sent. Individual or entity agrees to not disseminate or copy this DOKUMENT-ID / DOCUMENT-NO. VERSION GÜLTIG BIS - - - - information to anyone other than originally specified without the written consent of - - - AUS- nanoFaktur GmbH. 1 2 3 4 GABE ÄNDERUNG DATUM NAME www.nFaktur.com, info@nFaktur.com ABGELEITET V. - NACHFOLGER F. - 45 53 60

SPa Microscopy Sample Z-Stages Long Displacements - Extremely Flat (15mm) SPa sample stages are designed for scanning and positioning tasks along the optical axes in microscopy setups. Microscopy generally needs flat design to facilitate handling. SPS stages meet this requirement optimally by measuring only 15 mm in height. Another microsco- py-typical specification that SPa meet is a large aperture, which can optionally be equipped with sample- and/or petri- dish-holders. SPa stages perform lifting- ranges of up to 650 microns. SPa stages can optionally be delivered with mounting patterns compatible with Nikon, Zeiss, Olympus, Leica, etc. bases or stages. Product-Number SPS-D00120 SPS-D00450 SPS-D00650 Unit Displacement Sensor strain gages, full-bridge Displacement, closed loop 120 450 650 µm Displacement (-30..160 V) 170 580 820 µm Resolution, open loop 0.4 1 2 nm Resolution, closed loop 0.6 2 3 nm Linearity, closed loop 0.1 % Repeatability, closed loop 6 14 21 nm Push/Pull 50/20 50/20 40/15 N Resonance, unloaded 380 250 130 Hz El. Capacitance 4.4 13.2 13.2 µF Electrical Connection 1 D-S2ub 15 3 4 5 6 7 8 Body-Material 1 aluminum, b2 lack anodized 3 4 5 6 7 8 Operating Temperature A -20..+80 2x 1x45° p°eCripherally A A Sample Holder Mounting Plane 2x 1x45° peripherally A Sample Holder TMraovuenlt idnigre Pctliaonne Travel direction cable outlet B B cable outlet B B 237 .5 3x DIN 912 237 R9 M4x12 165 10 .5 C 3x DIN 912 R R9 C M4x12 4x R 165 0 7.5 R1 C C 4 160.2 x R7 142 .5 1ru6 0.2 Th3 142 4x M 4 x R Th ru D 4 3 D 4x M R4 D 4x D 150 225 18 150 225 E FREIMASSTOLERANZ MAßSTAB BEHANDLUNG RAUHEIT EINHEIT STANDARD TOLERANCE SCALE TREATMENT schwarz eloxiert UNIT mm E DIN ISO Ra1.61:2 WERKSTOFF / MATERIAL PROJECTION 27 AluminiumFREIMAS6ST8OL E-R AfNZ MAßSTAB BEHANDLUNG RAUHEIT EINHEIT - - - - STANDARD TDOALE UNIT TURMANCE SNCAAMLEE TBREEZAETICMHENNUTNG s/ TcIhTLwE arz eloxiert mm - DIN2 5I.0S1.O201 5 1:2 WERKSTOFF / MATERIAL Ra1.6 - KPo PROJECTION- - KONSTR. - - - - GEZ. 276258.0 1-.2 0f15 KPo AHlubmtiisnciuhm 300µm -- - - -- GEPR. - DATUM -NAME BEZEICHNUNG / TITLE -- -- -- -- KAOll NinfSorTmRa.tion2 p5ro.v0id1ed.2 in0 th1is5 drawKingP iso to ARTIKEL-ID / ITEM-NO. VERSION GÜLTIG BISbe considered confidential, proprietary and F -- -- -- -- GseEcZre.t informa2tio5n..0 1.2015 KPo HSPubSt-isDc0h0 300µm - -It is intended only for the use of the individual -- -- -- -- GorE ePntRity. to wh-om it is sent. Individu-al or entity agrees to not disseminate or copy this DOKUMENT-ID / DOCUMENT-NO. VERSION GÜLTIG BIS -- -- -- -- iAnlflo inrmfoarmtioant ioton apnryoovnidee do tihne trh tihsa dnr aowriignign aisll yt o ARTIKEL-ID / ITEM-NO. VERSION GÜLTIG BIS sbpee ccoifniesdid weriethdo cuot nthfied ewnrtiitatel,n p croopnrsieetnatr oy fa nd - - - F -AUS- - nanoFaktur GmbH. - 1 2 3 4 GABE ÄNDERUNG - -DATUM -NAME secret information. SPS-D00300wIt wisw in.nteFnadketudr .ocnolmy ,f oinr ftoh@e unsFea kotfu trh.ceo imndividual - - - - or entity to whom it is sent. Individual or entity ABGELEITET V. - NACHFOLGER F. - agrees to not disseminate or copy this DOKUMENT-ID / DOCUMENT-NO. VERSION GÜLTIG BIS - - - - information to anyone other than originally specified without the written consent of - - - AUS- nanoFaktur GmbH. 1 2 3 4 GABE ÄNDERUNG DATUM NAME www.nFaktur.com, info@nFaktur.com ABGELEITET V. - NACHFOLGER F. - 80 80 5 5 113.4 113.4 5.75 5.75 1.75 1.75 110.2 110.2 80 80 5.5 5.5 5.5 5.5 156 156 15 15 9.5 .5 9 4x R R 4x

SPa Inserts Z-Nanostages as Microscope Upgrades SPa inserts are piezo-driven Z-stages for upgrading inverted microscopes. SPa inserts fit onto bases or into standard XY-stages of microscopes. They provi- de most precise positioning along the optical axes. 3 different ranges are available: 120, 250 and 500 µm. The dimensions are the same for all ranges. Standard sample- and petri-dish-holders can be born in the aperture close to the objectives of the inverted microscopes. Product-Number SPS-D10120 SPS-D10250 SPS-D10500 Unit Displacement Sensor strain gages, full-bridge Displacement, closed loop 120 250 500 µm Displacement (-30..160 V) 150 320 650 µm Resolution, open loop 0.4 0.8 2 nm Resolution, closed loop 0.6 1.3 3 nm Linearity, closed loop 0.1 % Repeatability, closed loop 6 13 25 nm Push/Pull 50/20 40/15 40/15 N Resonance, unloaded 380 250 150 Hz Resonance, 125g load 270 180 110 Hz Resonance, 250g load 220 140 90 Hz El. Capacitance 4.4 8.8 13.2 µF Electrical Connection D-Sub 15 Dimensions, L x W x H 220 x 135 x 27.3 mm Aperture, L x W 128.5 x 86.5 mm Body-Material aluminum, black anodized Operating Temperature -20..80 °C 1 2 3 4 5 6 7 8 -0.05 Options: 160 -0.20 8 R 30 -Suitable driver, open-loop, EBO-050100 A A -Suitable controller, closed-loop, EBD -Sample- and Petri-Dish-Holder B B 141 27.3 8.5 4.5 C Sample support pads 0.5 C 0 U A LL HR 136.6 .7 T 4. 7 2 5 R8 127 4x L 4x M3x0.5 THRU AL 3,5 12,7 R20 D D 128.5 124.5 2.7 THRU ALL4x 5 4.7 E U AL L 5 TH R ,7 148 FREIMASSTOLERANZ MAßSTAB BEHANDLUNG. RAUHEIT EINHEIT x0 12 STANDARD TOLERANCE SCALE TREATMENT - UNIT mm x M3 3,5 156.6 DIN ISO 1:2 WERKSTOFF / MATERIAL Ra1.6 PROJECTION 4 220 2768 - f Aluminum black anodized - - - - DATUM NAME BEZEICHNUNG / TITLE Cable outlet 8 - - - - KONSTR. 20.11.2017 KPo- - - - GEZ. 20.11.2017 KPo Z-Probentisch - - - - GEPR. - - - - - -19All information provided in this drawing is to ARTIKEL-ID / ITEM-NO. VERSION GÜLTIG BISbe considered confidential, proprietary and F - - - - secret information. SPS-D10120 - - It is intended only for the use of the individual - - - - or entity to whom it is sent. Individual or entity agrees to not disseminate or copy this DOKUMENT-ID / DOCUMENT-NO. VERSION GÜLTIG BIS - - - - information to anyone other than originally specified without the written consent of - - - AUS- nanoFaktur GmbH. 1 2 3 4 GABE ÄNDERUNG DATUM NAME www.nFaktur.com, info@nFaktur.com ABGELEITET V. - NACHFOLGER F. - 89.5 135 70.5 15.5 100 R5 86.5 110 -0.05-0.20 67.5 76 94 106.6

SFa QuickFocus Objective Positioner The new designed SFa-D00100 Quick- Focus comes with great improvements. The body is only 40 mm long and so 10 mm shorter than comparable pro- ducts. The stiffness and the resonance- frequencies are higher for users to save scanning-time. The parallel flexure guidance gives highest positioning accu- racy and stability. Thread-adapters are available in many different sizes and can be exchanged in a minute. Versions with and without sensors are available. Product-Number SFa-b00100 Unit Displacement (closed loop) 100 µm Displacement (-45..180 V) 160 µm Resolution, open loop 0.5 nm Resolution, closed loop 1 nm Linearity, closed loop 0.2 % Repeatability 10 nm Push/Pull, maximum 20/10 N Stiffness 0.5 N/µm Resonance, with thread-adapter 620 Hz Resonance, with 150g objective 260 Hz El. Capacitance 3.3 µF Body-Material aluminum Operating Temperature -20..+80 °C Product-Name: SFa-b….. a = O for the open-loop version a = S for the version with position-sensor b = P for pigtails (wires without socket) b = L for Lemosa-socket (option for the open-loop version) b = D for DSub-socket, 15 pins (option for the version with sensor) Options: - Vacuum-Compatibility - Suitable driver, open-loop, EBO-050100 - Suitable controller, closed-loop, EBD-060100 20